Fast AFM array technology for
semiconductor metrology

Atomic force microscopy (AFM) is the gold standard for Z-axis measurement, but it is too slow for high-volume manufacturing.

icspi’s AFM array technology enables extreme throughput and unprecedented wafer coverage with AFM.

TECHNOLOGY

Our AFM array technology uses miniaturized 1 mm2 AFM scan heads in parallel. Each scan head is an entire MEMS-based AFM.
AFM scan head with 3-axis movement and on-chip sensing.

BENEFITS

AFM array technology enables chipmakers to achieve:

Scale the number of measurement points per wafer without increasing scan time using AFM arrays.

Contact Us

Interested to learn more about how AFM array technology can accelerate your time-to-yield? 

Follow the link below to request more information about AFM array technology.

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